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Title of the article METHOD FOR SELECTING THE FUNCTIONING MODES OF THE CARRIAGE DRIVE OF PROBE EQUIPMENT DURING TRANSIENT PROCESSES PROVIDING MINIMIZATION OF PROBING CYCLE DURATION. PART 1. METHOD FOR STUDYING MECHANICAL OSCILLATIONS OF THE OBJECT STAGE DRIVE
Authors

KOZINETS Alexei V., Engineer, Planar JSC, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

BASINIUK Vladimir L., D. Sc. in Eng., Prof., Chief of the R&D Center “Mechanical Engineering Technologies and Processing Equipment” – Head of the Laboratory of Gearing Systems and Processing Equipment, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

VOLKOTRUB Rita E., Researcher, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.
In the section DYNAMICS, DURABILITY OF VEHICLES AND STRUCTURES
Year 2022
Issue 4(61)
Pages 38–45
Type of article RAR
Index UDK 621.81
DOI https://doi.org/10.46864/1995-0470-2022-4-61-38-45
Abstract The article presents the results of the analysis of preliminary studies of mechanical vibrations with a natural frequency of the object stage of the probe equipment. They made it possible to establish that the duration of their attenuation, until the completion of which the crystals’ validity cannot be controlled, significantly depends on the mode of motion dynamics during acceleration and braking. At the same time their duration is up to ~87 % of time of the probing cycle and under certain modes of drive operation, it has a minimum that allows, without the use of active vibration damping systems, to reduce the duration of the vibration damping process by 25–36 % with a corresponding increase in the productivity of the probing process. It is shown that the range of variation of the step of the object stage displacement from the standpoint of its influence on the damping time of mechanical vibrations can conditionally be divided into two ranges: 1) displacement with a step of less than 2–3.5 mm, the most promising from the standpoint of a stably existing trend of minimizing the size of crystals, at which the damping time of oscillations is significant and depends nonlinearly on the value of this step, and 2) displacement with a step of more than 2–3.5 mm, for which the damping time of oscillations does not practically depend on the displacement step. Algorithm of further studies is proposed that makes it possible, after their implementation, to develop a method for choosing rational modes of operation of the probe equipment carriage drive during transient processes that ensure minimization of the duration of the probing cycle.
Keywords probe equipment, method, microelectronics, transient processes, performance
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Bibliography
  1. Karpovich S.E., Jarski V.V., Dainiak I.V. Pretsizionnye sistemy peremeshcheniy dlya oborudovaniya proizvodstva izdeliy elektronnoy tekhniki [Precision motion systems for equipment of electronic technics manufacturing]. Doklady BGUIR, 2014, no. 2(80), pp. 60–72 (in Russ.).
  2. Losev V.V. Razvitie metodov zondovoy mikroskopii dlya issledovaniya i kontrolya poverkhnostey materialov i izdeliy mikroelektroniki. Diss. kand. tekhn. nauk [Development of probe microscopy methods for research and control of surfaces of materials and products of microelectronics. Ph. D. Thesis]. Moscow, 2002. 174 p. (in Russ.).
  3. Smirnov K.K. Avtomatizatsiya operatsiy proslezhivaemosti kachestva integralnykh struktur pri proizvodstve sverkhbolshikh integralnykh skhem [Automation of traceability operations for the quality of integrated structures in the production of super-large-scale integrated circuits]. Trudy MAI, 2015, no. 95. Available at: http://trudymai.ru/upload/iblock/bda/Smirnov_rus. pdf (accessed 17 May 2018) (in Russ.).
  4. Hudec J. Methodology of functional test synthesis and verification for VLSI Systems. ITI 2000. Proc. 22nd International conference on information technology interfaces, 2000, pp. 61–66.
  5. Minchenko V.A., Kovalchuk G.F., Shkolyk S.B. Printsipy postroeniya i strukturnye skhemy zondovykh avtomaticheskikh sistem kontrolya parametrov izdeliy mikro- i nanoelektroniki na plastine [Design principles and block schemes of the probe automatic inspection systems for microand nanoelectronics on a wafer]. Devices and methods of measurements, 2012, no. 2, pp. 67–75 (in Russ.).
  6. Dainiak I.V., Begun D.G., Poliakovski V.V. Integrirovannaya sistema mnogokoordinatnykh peremeshcheniy dlya sborochnogo oborudovaniya mikroelektroniki [Integrated system of multicoordinate movements for assembly equipment of microelectronics]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya B. Promyshlennost. Prikladnye nauki, 2014, no. 11, pp. 59–64 (in Russ.).
  7. Losev V.V. Razvitie metodov zondovoy mikroskopii dlya issledovaniya i kontrolya poverkhnostey materialov i izdeliy mikroelektroniki. Avtoref. diss. kand. tekhn. nauk [Development of probe microscopy methods for the study and control of surfaces of materials and products of microelectronics. Extended abstract of Ph. D. Thesis]. Moscow, 2002. 175 p. (in Russ.).
  8. Zharskiy V.V., et al. Sistemy mnogokoordinatnykh peremeshcheniy i ispolnitelnye mekhanizmy dlya pretsizionnogo tekhnologicheskogo oborudovaniya [Systems of multicoordinate movements and actuators for precision technological equipment]. Minsk, 2013. 208 p. (in Russ.).
  9. Mikhaylov M.A. Sistema pretsizionnogo mekhanicheskogo peremeshcheniya dlya povysheniya prostranstvennogo razresheniya i tochnosti izmereniy lineynykh razmerov v skaniruyushchem zondovom mikroskope. Diss. kand. tekhn. nauk [Precision mechanical displacement system for increasing the spatial resolution and accuracy of measurements of linear dimensions in a scanning probe microscope. Ph. D. Thesis]. Saint Petersburg, 2015. 128 p. (in Russ.).
  10. Vashchenko P.A. Modelirovanie i-koordinatnykh vibrozashchitnykh ustroystv oborudovaniya elektronnoy tekhniki. Diss. kand. tekhn. nauk [Modeling of i-coordinate vibration protection devices for electronic equipment. Ph. D. Thesis]. Voronezh, 2009. 16 p. (in Russ.).