4_2022_sen_6

Title of the article RADIATION RESISTANCE OF MULTILAYER NANOSTRUCTURED COATINGS nc-ZrN/a-ZrCu IRRADIATED WITH HELIUM IONS
Authors

UGLOV Vladimir V., D. Sc. in Phys. and Math., Prof., Head of the Department of Solid State Physics, Belarusian State University, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

ZLOTSKI Sergey V., Ph. D. in Phys. and Math., Senior Researcher of the Department of Solid State Physics, Belarusian State University, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

ZHORNIK Viktor I., D. Sc. in Eng., Prof., Head of the Department of Technologies of Mechanical Engineering and Metallurgy – Head of the Laboratory of Nanostructured and Superhard Materials, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

VEREMEY Ilya S., Technician of the Laboratory of Nanostructured and Superhard Materials, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

SOLODUKHIN Igor A., Ph. D. in Phys. and Math., Assoc. Prof., Associate Professor of the Department of Solid State Physics, Belarusian State University, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.
In the section MECHANICAL ENGINEERING MATERIALS AND TECHNOLOGIES
Year 2022
Issue 4(61)
Pages 53–60
Type of article RAR
Index UDK 544.022.51
DOI https://doi.org/10.46864/1995-0470-2022-4-61-53-60
Abstract The paper presents the results of surface radiation erosion and stress evolution of multilayer coatings made of ZrN ceramic layers and metallic glass (Zr-Cu) under He2+ ion irradiation with an energy of 40 keV and fluences from 5·1016 to 1.1·1018 cm−2. Multilayer coatings of nc-ZrN/a-Zr1−хCuх with an elementary layer thickness of 5 nm/5 nm and 5 nm/10 nm are formed by reactive magnetron sputtering with different copper Cu contents (x = 0.45; 0.53; 0.61 and 0.74). Sputtering took place from Zr and Cu targets at a substrate temperature T = 300 °C. The surface of the films remained stable up to a fluence of 5·1017 cm−2. It has been found that with an increase in the ion fluence, the radiation erosion of the surface develops according to the flecking mechanism. It has been established that an increase in the thickness of the amorphous layer and the copper content increase the resistance to irradiation (the critical fluence increases from 5·1017 cm−2 to 8·1017 cm−2). Irradiation with helium He ions leads to a decrease in the level of compressive stresses. Reducing the level of stresses in multilayer films is associated with the effects of changes in the microstructure of the layers (shape distortion) at a dose of 2·1017 cm−2 and radiation erosion at a dose of 8·1017 cm−2.
Keywords multilayer films, magnetron sputtering, helium ion irradiation, stresses, amorphous layers, flecking
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