1_2023_sen_7

Title of the article METHOD FOR SELECTING THE FUNCTIONING MODES OF THE CARRIAGE DRIVE OF PROBE EQUIPMENT DURING TRANSIENT PROCESSES. PART 2
Authors

KOZINETS Alexei V., Engineer, Planar JSC, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

BASINIUK Vladimir L., D. Sc. in Eng., Prof., Chief of the R&D Center “Mechanical Engineering Technologies and Processing Equipment” – Head of the Laboratory of Gearing Systems and Processing Equipment, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

VOLKOTRUB Rita E., Researcher of the Laboratory of Gearing Systems and Processing Equipment of the R&D Center “Mechanical Engineering Technologies and Processing Equipment”, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.
In the section MECHANICAL ENGINEERING COMPONENTS
Year 2023
Issue 1(62)
Pages 47–54
Type of article RAR
Index UDK 621.81
DOI https://doi.org/10.46864/1995-0470-2023-1-62-47-54
Abstract The article presents the results of studies, the analysis of which made it possible to identify features that affect the duration of the main periods of horizontal movement by the carriage drive with the object stage of the probe control equipment, the main of which include the mode of smoothness (dynamics) of movement and the accelerations associated with it during acceleration and braking, provided by the setting of the motor controller, as well as the step of displacement. It is shown that for specific inertia-stiffness and damping characteristics of the probe control equipment, the determination of accelerations for each mode of smoothness and duration of damping of mechanical oscillations after the carriage with the object stage moves to a given coordinate can be carried out in the debug mode of the probe control equipment or automatically using adaptive control. A method is proposed for selecting rational operating modes for the carriage drive with an object stage of probe equipment during transient processes using a database and a displacement step (of crystal size), which makes it possible for each smoothness mode to determine the cyclogram of its displacement and the total duration of the entire cycle, from which the minimum cycle is selected and implemented.
Keywords probe equipment, method, microelectronics, transient processes, performance
  You can access full text version of the article.
Bibliography
  1. Karpovich S.E., Jarski V.V., Dainiak I.V. Pretsizionnye sistemy peremeshcheniy dlya oborudovaniya proizvodstva izdeliy elektronnoy tekhniki [Precision motion systems for equipment of electronic technics manufacturing]. Doklady BGUIR, 2014, no. 2(80), pp. 60–72 (in Russ.).
  2. Losev V.V. Razvitie metodov zondovoy mikroskopii dlya issledovaniya i kontrolya poverkhnostey materialov i izdeliy mikroelektroniki. Diss. kand. tekhn. nauk [Development of probe microscopy methods for research and control of surfaces of materials and products of microelectronics. Ph. D. Thesis]. Moscow, 2002. 174 p. (in Russ.).
  3. Smirnov K.K. Avtomatizatsiya operatsiy proslezhivaemosti kachestva integralnykh struktur pri proizvodstve sverkhbolshikh integralnykh skhem [Automation of traceability operations for the quality of integrated structures in the production of super-large-scale integrated circuits]. Trudy MAI, 2015, no. 95. Available at: http://trudymai.ru/upload/iblock/bda/Smirnov_rus.pdf (accessed 17 May 2018) (in Russ.).
  4. Hudec J. Methodology of functional test synthesis and verification for VLSI Systems. ITI 2000. Proc. 22nd International conference on information technology interfaces, 2000, pp. 61–66.
  5. Minchenko V.A., Kovalchuk G.F., Shkolyk S.B. Printsipy postroeniya i strukturnye skhemy zondovykh avtomaticheskikh sistem kontrolya parametrov izdeliy mikro- i nanoelektroniki na plastine [Design principles and block schemes of the probe automatic inspection systems for micro- and nanoelectronics on a wafer]. Devices and methods of measurements, 2012, no. 2, pp. 67–75 (in Russ.).
  6. Dainiak I.V., Begun D.G., Poliakovski V.V. Integrirovannaya sistema mnogokoordinatnykh peremeshcheniy dlya sborochnogo oborudovaniya mikroelektroniki [Integrated system of multicoordinate movements for assembly equipment of microelectronics]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya B. Promyshlennost. Prikladnye nauki, 2014, no. 11, pp. 59–64 (in Russ.).
  7. Losev V.V. Razvitie metodov zondovoy mikroskopii dlya issledovaniya i kontrolya poverkhnostey materialov i izdeliy mikroelektroniki. Avtoref. diss. kand. tekhn. nauk [Development of probe microscopy methods for the study and control of surfaces of materials and products of microelectronics. Extended Abstract of Ph. D. Thesis]. Moscow, 2002. 28 p. (in Russ.).
  8. Zharskiy V.V., Karpovich S.E., Daynyak I.V. Sistemy mnogokoordinatnykh peremeshcheniy i ispolnitelnye mekhanizmy dlya pretsizionnogo tekhnologicheskogo oborudovaniya [Systems of multicoordinate movements and actuators for precision technological equipment]. Minsk, 2013. 208 p. (in Russ.).
  9. Mikhaylov M.A. Sistema pretsizionnogo mekhanicheskogo peremeshcheniya dlya povysheniya prostranstvennogo razresheniya i tochnosti izmereniy lineynykh razmerov v skaniruyushchem zondovom mikroskope. Diss. kand. tekhn. nauk [Precision mechanical displacement system for increasing the spatial resolution and accuracy of measurements of linear dimensions in a scanning probe microscope. Ph. D. Thesis]. Saint Petersburg, 2015. 127 p. (in Russ.).
  10. Vashchenko P.A. Modelirovanie ℓ-koordinatnykh vibrozashchitnykh ustroystv oborudovaniya elektronnoy tekhniki. Diss. kand. tekhn. nauk [Modeling of i-coordinate vibration protection devices for electronic equipment. Ph. D. Thesis]. Voronezh, 2009. 213 p. (in Russ.).
  11. Kozinets A.V., Basiniuk V.L., Volkotrub R.E. Metodika vybora rezhimov funktsionirovaniya privoda karetki zondovogo oborudovaniya pri perekhodnykh protsessakh, obespechivayushchikh minimizatsiyu dlitelnosti tsikla zondirovaniya. Chast 1. Metodika issledovaniy mekhanicheskikh kolebaniy privoda predmetnogo stolika [Method for selecting the functioning modes of the carriage drive of probe equipment during transient processes providing minimization of probing cycle duration. Part 1. Method for studying mechanical oscillations of the object stage drive]. Mechanics of machines, mechanisms and materials, 2022, no. 4(61), pp. 38–45 (in Russ.).
  12. Kovensky A.V., Kozinets A.V., Morozhanov E.A. Monitoring v ekspluatatsii parametrov kolebaniy komponentov otvetstvennykh uzlov mekhatronnykh sistem [Monitoring in operation of vibration parameters of components of critical joints of mechatronic systems]. Aktualnye voprosy mashinovedeniya, 2022, iss. 11, pp. 61–65 (in Russ.).