COMBINATION ACTUATOR OF THE LINEAR COORDINATE SYSTEM OF TECHNOLOGICAL EQUIPMENT WITH CONTROL PROPULSIVE FORCE

Basinyuk V.L., Doctor of Technical Sciences, Associate Professor, Director of the STC “Technology of mechanical engineering and process equipment”, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus, This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.

Mardosevich E.I., Candidate of Technical Sciences, Head of the Section of Perspective Drives and Tribological Systems, STC “Technology of mechanical engineering and process equipment”, Joint Institute of Mechanical Engineering of the NAS of Belarus, Minsk, Republic of Belarus

Papina S.S., Head of the Department, UP “Design Bureau of Precise Electronic Engineering - Assembly Equipment”, GNP “Planar”, Minsk, Republic of Belarus

Lomako V.G., , Head of the Section UP “Design Bureau of Precise Electronic Engineering - Assembly Equipment”, GNP “Planar”, Minsk, Republic of Belarus

The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a combination actuator wherein in addition to the main motor in the construction is entered another relatively low$powered program$controlled linear electromotor are shown. Its armature is directly connected with the movable table. With help of the linear electromotor additional program-controlled propulsive force is created under its acceleration or braking the table, it eliminates the occurrence of natural vibrations when it reaches cutting feed rate or stop.

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